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Influence of composition deviation from around Ba (Zn_<1/3>Ta_<2/3>) O_3 (BZT) on superlattice ordering and microwave Q factor were studied. The superlattice ordering ratio (ordered-disordered structure formation) was found to be dependent on slight composition deviations around BZT. Ordered structure with perovskite single phase was obtained in the vicinity of the Stoichiometric BZT. In this region, the significant high Q factor (Q・f = 110000 GHz) was found. Disordered perovskite with lower density and secondary phase in the ordered perovskite were thought to be the causes of Q factor decrement. Suppressions of the secondary phases and the disordered phases by strict composition control can provide further Q factor improvements for the BZT system.