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X-ray photoelectron spectroscopy and Auger electron spectroscopy analyses of the initial growth mechanism of CdTe layers on (100) GaAs by metalorganic vapor phase epitaxy
https://nitech.repo.nii.ac.jp/records/4040
https://nitech.repo.nii.ac.jp/records/40400add5515-7523-4f6c-80e3-4d1348d142d1
名前 / ファイル | ライセンス | アクション |
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本文_fulltext (686.8 kB)
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Copyright (1990) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 67(11), pp.6865-6870 ; 1990 and may be found at http://link.aip.org/link/?jap/67/6865
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-11-06 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | X-ray photoelectron spectroscopy and Auger electron spectroscopy analyses of the initial growth mechanism of CdTe layers on (100) GaAs by metalorganic vapor phase epitaxy | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Ekawa, Mitsuru
× Ekawa, Mitsuru× Yasuda, Kazuhito× Sone, Syuji× Sugiura, Yoshiyuki× Saji, Manabu× Tanaka, Akikazu |
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著者別名 | ||||||
姓名 | 安田, 和人 | |||||
書誌情報 |
JOURNAL OF APPLIED PHYSICS 巻 67, 号 11, p. 6865-6870, 発行日 1990-06-01 |
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出版者 | ||||||
出版者 | American Institute of Physics | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID(NCID) | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1063/1.345076 | |||||
関連名称 | 10.1063/1.345076 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | X‐ray photoelectron spectroscopy and Auger electron spectroscopy measurements were performed to investigate the initial growth mechanism and the selection of growth orientations of CdTe layers grown on (100) GaAs by metalorganic vapor phase epitaxy (MOVPE). The surface stoichiometry of the GaAs substrate was found to recover when annealed in a H2 flow atmosphere (500°C, 5 min), although the surface was initially in an As‐rich condition after chemical etching by H2SO4@B:H2O2@B:H2O=5@B:1@B:1. No oxide was observed at both the etched and H2 annealed GaAs surfaces. Preferential adsorption of Te occurred on the GaAs surface when H2 annealing was carried out in the growth reactor in the presence of residual CdTe deposits. One monolayer of Te with a thickness of about 1.8 A was adsorbed on the GaAs surface when the H2 annealed GaAs was exposed to diethyltelluride during the cooling period from the annealing temperature to the growth temperature (420°C). On the other hand, minimal adsorption of Cd occurred when the H2 annealed GaAs was exposed to dimethylcadmium during the above period. (100) CdTe growth was reproducibly achieved when the GaAs surface was completely covered by one monolayer of Te before growth, otherwise (111) growth occurred. Differences in the initial growth mechanism between MOVPE and molecular‐beam epitaxy are also discussed. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |