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Mechanism of arsenic incorporation and electrical properties in CdTe layers grown by metalorganic vapor phase epitaxy
https://nitech.repo.nii.ac.jp/records/4136
https://nitech.repo.nii.ac.jp/records/4136ae008881-98b8-4f6c-bb78-9f4151420011
名前 / ファイル | ライセンス | アクション |
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本文_fulltext (766.8 kB)
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Copyright (1992) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 71(6), pp.2669-2674 ; 1992 and may be found at http://link.aip.org/link/?jap/71/2669
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-11-06 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Mechanism of arsenic incorporation and electrical properties in CdTe layers grown by metalorganic vapor phase epitaxy | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Ekawa, Mitsuru
× Ekawa, Mitsuru× Yasuda, Kazuhito× Ferid, Touati× Saji, Manabu× Tanaka, Akikazu |
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著者別名 | ||||||
姓名 | 安田, 和人 | |||||
書誌情報 |
JOURNAL OF APPLIED PHYSICS 巻 71, 号 6, p. 2669-2674, 発行日 1992-03-15 |
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出版者 | ||||||
出版者 | American Institute of Physics | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID(NCID) | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1063/1.351039 | |||||
関連名称 | 10.1063/1.351039 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | The As doping mechanism in (100) CdTe layers grown on (100)GaAs by atmospheric‐pressure metalorganic vapor phase epitaxy was studied. Triethylarsine (TEAs) was used as a dopant source. The source materials used were dimethylcadmium (DMCd) and diethyltelluride (DETe). The As incorporation was enhanced by decreasing the DETe flow rate under a fixed DMCd flow condition, and by lowering the growth temperature. Assuming 100% activation of As, the As incorporation efficiency was estimated to be about 0.1%. The As incorporation was dominated by the sticking rate of the As species onto the Cd species. The hole concentration was controlled from 2×1015 to 3×1016 cm-3 in proportion to the TEAs flow rate below 1×10-7 mol/min. Those doped layers showed hole mobilities as high as 75 cm2/Vs. Low‐temperature photoluminescence (PL) studies revealed that a neutral‐acceptor bound‐exciton at 1.5901 eV is due to a substitutional As acceptor on the Te site. The As ionization energy was about 90 meV from the PL and electrical measurements. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |