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Formation and size control of a Ni cluster by plasma gas condensation
https://nitech.repo.nii.ac.jp/records/4600
https://nitech.repo.nii.ac.jp/records/4600a1a3734a-294f-4ce7-a340-2f50a61157c8
| 名前 / ファイル | ライセンス | アクション |
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本文_fulltext (939.3 kB)
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Copyright (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 84(9), pp.5270- 5276 ; 1998 and may be found at http://link.aip.org/link/?jap/84/5270
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2012-11-06 | |||||||||
| タイトル | ||||||||||
| タイトル | Formation and size control of a Ni cluster by plasma gas condensation | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | journal article | |||||||||
| 著者 |
Hihara, Takehiko
× Hihara, Takehiko
× Sumiyama, Kenji
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| 著者別名 | ||||||||||
| 姓名 | 日原, 岳彦 | |||||||||
| 著者別名 | ||||||||||
| 姓名 | 隅山, 兼治 | |||||||||
| bibliographic_information |
en : JOURNAL OF APPLIED PHYSICS 巻 84, 号 9, p. 5270-5276, 発行日 1998-11-01 |
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| 出版者 | ||||||||||
| 出版者 | American Institute of Physics | |||||||||
| 言語 | en | |||||||||
| ISSN | ||||||||||
| 収録物識別子タイプ | ISSN | |||||||||
| 収録物識別子 | 0021-8979 | |||||||||
| item_10001_source_id_32 | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AA00693547 | |||||||||
| 出版タイプ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | We have constructed a plasma-gas-condensation type cluster deposition apparatus and tried to find the optimum operation conditions for controlling the cluster size. Transmission electron microscope (TEM) observation has been done to evaluate sizes of Ni clusters produced when varying the volume of a cluster growth region, sputtering power, and inert gas pressure. The mean cluster size decreases by decreasing the volume of growth region and the sputtering power. The smallest cluster obtained in this work is about 2.3 nm in diameter. We have considered the following two models for the cluster growth: (1) a cluster-cluster collision growth and (2) an atomic vapor condensation growth. The cluster growth speed estimated from the former is too slow, while that from the latter is reasonable in comparison with the present experiments. When stable embryos are made from atom collisions, they grow up faster and the final cluster sizes estimated from the latter model are consistent with those observed by TEM. | |||||||||
| 言語 | en | |||||||||
