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Global model of inductively coupled Ar plasmas using two-temperature approximation
https://nitech.repo.nii.ac.jp/records/4940
https://nitech.repo.nii.ac.jp/records/49404f5c38b1-cd47-438c-8272-cc6bac95c042
| 名前 / ファイル | ライセンス | アクション |
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本文_fulltext (118.4 kB)
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Copyright (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 89(8), pp.4240- 4246 ; 2001 and may be found at http://link.aip.org/link/?jap/89/4240
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2012-11-06 | |||||||||
| タイトル | ||||||||||
| タイトル | Global model of inductively coupled Ar plasmas using two-temperature approximation | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | journal article | |||||||||
| 著者 |
Kimura, Takashi
× Kimura, Takashi
× Oe, K.
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| 著者別名 | ||||||||||
| 姓名 | 木村, 高志 | |||||||||
| bibliographic_information |
en : JOURNAL OF APPLIED PHYSICS 巻 89, 号 8, p. 4240-4246, 発行日 2001-04-15 |
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| 出版者 | ||||||||||
| 出版者 | American Institute of Physics | |||||||||
| 言語 | en | |||||||||
| ISSN | ||||||||||
| 収録物識別子タイプ | ISSN | |||||||||
| 収録物識別子 | 0021-8979 | |||||||||
| item_10001_source_id_32 | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AA00693547 | |||||||||
| 出版タイプ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
| item_10001_relation_34 | ||||||||||
| 関連タイプ | isIdenticalTo | |||||||||
| 識別子タイプ | DOI | |||||||||
| 関連識別子 | http://dx.doi.org/10.1063/1.1354652 | |||||||||
| 関連名称 | 10.1063/1.1354652 | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | The electron energy distribution function (EEDF) is measured with a Langmuir probe in an inductively coupled rf (13.56 MHz) Ar discharge in the pressure range from 5 to 70 mTorr, by changing the power injected into the plasma up to 100 W. The EEDFs measured at a pressure of 5 mTorr formed a bi-Maxwellian structure, which is not prominent due to high electron density, in the energy region lower than the lowest excitation threshold energy. The EEDF structure in the energy region higher than the threshold has a significant depletion of high energy electrons. The EEDF measured at a pressure higher than 10 mTorr can be approximated using a two-temperature distribution, which consists of the higher temperature in a low-energy region below the lowest excitation threshold and the lower temperature in a high-energy region. A global model using the two-temperature distribution is proposed and compared with the experimental results. The model consists of the rate equations for neutrals and charged particles and an energy-balance equation for electrons together with the balance equation for high-energy electrons. Pressure dependences of the electron density and temperatures predicted in this global model agree well with the experimental results except in the pressure range lower than 10 mTorr. | |||||||||
| 言語 | en | |||||||||
