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Spectroscopic properties of nitrogen doped hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition
https://nitech.repo.nii.ac.jp/records/4963
https://nitech.repo.nii.ac.jp/records/4963bdf13d75-0fec-4421-b072-9f3c21c76ae8
| 名前 / ファイル | ライセンス | アクション |
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本文_fulltext (277.0 kB)
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Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 89(12), pp.7924- 7931; 2001 and may be found at http://link.aip.org/link/?jap/89/7924
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||||||||||||||||||
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| 公開日 | 2012-11-06 | |||||||||||||||||||||||||
| タイトル | ||||||||||||||||||||||||||
| タイトル | Spectroscopic properties of nitrogen doped hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition | |||||||||||||||||||||||||
| 言語 | en | |||||||||||||||||||||||||
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| 言語 | eng | |||||||||||||||||||||||||
| 資源タイプ | ||||||||||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||||||||||
| 著者 |
Hayashi, Y.
× Hayashi, Y.
× Yu, G.
× Rahman, M. M.
× Krishna, K. M.
× 曾我, 哲夫
× Jimbo, Takashi
× Umeno, Masayoshi
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| 著者別名 | ||||||||||||||||||||||||||
| 姓名 | Soga, Tetsuo | |||||||||||||||||||||||||
| 言語 | en | |||||||||||||||||||||||||
| 姓名 | 曾我, 哲夫 | |||||||||||||||||||||||||
| 言語 | ja | |||||||||||||||||||||||||
| 姓名 | ソガ, テツオ | |||||||||||||||||||||||||
| 言語 | ja-Kana | |||||||||||||||||||||||||
| 著者別名 | ||||||||||||||||||||||||||
| 姓名 | 神保, 孝志 | |||||||||||||||||||||||||
| 著者別名 | ||||||||||||||||||||||||||
| 姓名 | 梅野, 正義 | |||||||||||||||||||||||||
| bibliographic_information |
en : JOURNAL OF APPLIED PHYSICS 巻 89, 号 12, p. 7924-7931, 発行日 2001-06-15 |
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| 出版者 | ||||||||||||||||||||||||||
| 出版者 | American Institute of Physics | |||||||||||||||||||||||||
| 言語 | en | |||||||||||||||||||||||||
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| 収録物識別子タイプ | ISSN | |||||||||||||||||||||||||
| 収録物識別子 | 0021-8979 | |||||||||||||||||||||||||
| item_10001_source_id_32 | ||||||||||||||||||||||||||
| 収録物識別子タイプ | NCID | |||||||||||||||||||||||||
| 収録物識別子 | AA00693547 | |||||||||||||||||||||||||
| 出版タイプ | ||||||||||||||||||||||||||
| 出版タイプ | VoR | |||||||||||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||||
| item_10001_relation_34 | ||||||||||||||||||||||||||
| 関連タイプ | isIdenticalTo | |||||||||||||||||||||||||
| 識別子タイプ | DOI | |||||||||||||||||||||||||
| 関連識別子 | http://dx.doi.org/10.1063/1.1371268 | |||||||||||||||||||||||||
| 関連名称 | 10.1063/1.1371268 | |||||||||||||||||||||||||
| 内容記述 | ||||||||||||||||||||||||||
| 内容記述タイプ | Other | |||||||||||||||||||||||||
| 内容記述 | Nitrogen doped hydrogenated amorphous carbon thin films have been deposited by rf plasma-enhanced chemical vapor deposition using CH4 as the source of carbon and with different nitrogen flow rates (N2/CH4 gas ratios between 0 and 3), at 300 K. The dependence modifications of the optical and the structural properties on nitrogen incorporation were investigated using different spectroscopic techniques, such as, Raman spectroscopy, Fourier transform infrared spectroscopy, x-ray photoelectron spectroscopy, ultraviolet-visible (UV-VIS) spectroscopy, electron spin resonance (ESR), photoluminescence (PL) and spectroscopic ellipsometry (SE). Raman spectroscopy and IR absorption reveal an increase in sp2-bonded carbon or a change in sp2 domain size with increasing nitrogen flow rate. It is found that the configuration of nitrogen atoms incorporated into an amorphous carbon network gradually changes from nitrogen atoms surrounded by three (σ bonded) to two (π bonded) neighboring carbons with increasing nitrogen flow rate. Tauc optical gap is reduced from 2.6 to 2.0 eV, and the ESR spin density and the peak-to-peak linewidth increase sharply with increasing nitrogen flow rate. Excellent agreement has been found between the measured SE data and modeled spectra, in which an empirical dielectric function of amorphous materials and a linear void distribution along the thickness have been assumed. The influence of nitrogen on the electronic density of states is explained based on the optical properties measured by UV-VIS and PL including nitrogen lone pair band. | |||||||||||||||||||||||||
| 言語 | en | |||||||||||||||||||||||||
