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Comparative study on alloy cluster formation in Co-Al and Co-Pt systems
https://nitech.repo.nii.ac.jp/records/5057
https://nitech.repo.nii.ac.jp/records/505778d2ca2b-0991-4dd5-a506-d693405ab77e
名前 / ファイル | ライセンス | アクション |
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本文_fulltext (632.4 kB)
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Copyright(2002) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science and Technology B, 20(3),pp.834-842 ; 2002 and may be found at http://link.aip.org/link/?jvb/20/834.
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-11-06 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Comparative study on alloy cluster formation in Co-Al and Co-Pt systems | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Konno, Toyohiko J.
× Konno, Toyohiko J.× Yamamuro, Saeki× Sumiyama, Kenji |
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著者別名 | ||||||
姓名 | 隅山, 兼治 | |||||
書誌情報 |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 巻 20, 号 3, p. 834-842, 発行日 2002-05 |
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出版者 | ||||||
出版者 | American Vacuum Society | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 10711023 | |||||
書誌レコードID(NCID) | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10804928 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1116/1.1470518 | |||||
関連名称 | 10.1116/1.1470518 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | The formation of alloy clusters using a plasma-gas-aggregation technique is described for Co-Al and Co-Pt systems. This method employs two separate elemental sputtering sources and a growth chamber. Metallic vapors generated were cooled rapidly in an Ar atmosphere, and grown into alloy clusters. The composition of the clusters was controlled by adjusting the ratio of the applied sputtering power. We found that B2-CoAl clusters of about 12 nm in diameter were formed for a composition range wider than that predicted by the Co-Al phase diagram, and that high-temperature fcc-CoPt clusters were formed in the Co-Pt system. These findings suggest the nonequilibrium nature of the cluster formation. The size distribution of the clusters is highly monodispersive and does not follow commonly observed log-normal distribution. These results were discussed from the viewpoint of simple gas dynamics. We concluded that monomer absorption with discrete residence time is the dominant mechanism for monodispersive alloy cluster formation, and that the contrasting thermodynamical features between the Co-Al and Co-Pt systems are at the cause of the observed difference in average cluster size. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |