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Experimental study and global model of inductively coupled CF 4/O2 discharges
https://nitech.repo.nii.ac.jp/records/5313
https://nitech.repo.nii.ac.jp/records/53133b029494-fc0d-4a4c-ba98-4ab0b0976fc0
| 名前 / ファイル | ライセンス | アクション |
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本文_fulltext (223.9 kB)
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Copyright (2006) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 100(6), pp.063303-1- 063303-9 ; 2006 and may be found at http://link.aip.org/link/?jap/100/063303
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||
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| 公開日 | 2012-11-06 | |||||||||
| タイトル | ||||||||||
| タイトル | Experimental study and global model of inductively coupled CF 4/O2 discharges | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | journal article | |||||||||
| 著者 |
Kimura, Takashi
× Kimura, Takashi
× Noto, Masahisa
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| 著者別名 | ||||||||||
| 姓名 | 木村, 高志 | |||||||||
| bibliographic_information |
en : JOURNAL OF APPLIED PHYSICS 巻 100, 号 6, p. 063303-1-063303-9, 発行日 2006-09-21 |
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| 出版者 | ||||||||||
| 出版者 | American Institute of Physics | |||||||||
| 言語 | en | |||||||||
| ISSN | ||||||||||
| 収録物識別子タイプ | ISSN | |||||||||
| 収録物識別子 | 0021-8979 | |||||||||
| item_10001_source_id_32 | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AA00693547 | |||||||||
| 出版タイプ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
| item_10001_relation_34 | ||||||||||
| 関連タイプ | isIdenticalTo | |||||||||
| 識別子タイプ | DOI | |||||||||
| 関連識別子 | http://dx.doi.org/10.1063/1.2345461 | |||||||||
| 関連名称 | 10.1063/1.2345461 | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | Experiments with a Langmuir probe and optical emission spectroscopy combined with actinometry were carried out in inductive CF4/O2 discharges at three pressures of 8, 15, and 25 mTorr. The measured electron energy probability functions are approximately Maxwellian at any oxygen content. The measured electron density decreases with increasing the oxygen in the oxygen content below 20%, beyond which it remains nearly constant. On the other hand, the measured electron temperature is not sensitive to the content. The atomic fluorine density estimated by actinometry increases markedly as oxygen is mixed to CF4 discharges, and then reaches the maximum around the oxygen content of 20%-30%, beyond which it decreases with increasing oxygen content. The atomic oxygen density increases with the increase in the oxygen content except for the oxygen content higher than 90%. A global model for electronegative plasma is used in order to investigate the plasma chemistry in CF4/O2 discharges assuming the Maxwellian electron energy distribution. The model results are compared with the experimental results, obtaining reasonably good agreement. | |||||||||
| 言語 | en | |||||||||
