@article{oai:nitech.repo.nii.ac.jp:00001418,
 author = {Research Center for Nano-Device and System Nagoya Institute of Technology},
 journal = {極微構造デバイス研究センター報告書 = Technical Report at Research Center for Micro-Structure Devices},
 month = {Mar},
 note = {application/pdf},
 pages = {287--404},
 title = {Si基板上GaA系化合物半導体内欠陥の水素プラズマによる不活性化に関する研究},
 volume = {8},
 year = {2001}
}