@article{oai:nitech.repo.nii.ac.jp:00001615, author = {Research, Center for Nano-Device and System Nagoya Institute of Technology}, journal = {極微デバイス機能システム研究センター報告書 = Technical report at Research Center for Nano-Device and System}, month = {Mar}, note = {application/pdf}, pages = {1--140}, title = {Ion Implantation Doping and Gate Insulators of GaN}, volume = {1}, year = {2004} }