{"created":"2024-02-07T06:57:24.314061+00:00","id":2000069,"links":{},"metadata":{"_buckets":{"deposit":"07f5daf0-3a5e-4cfe-aab9-69f259fa4014"},"_deposit":{"created_by":16,"id":"2000069","owner":"16","owners":[16],"pid":{"revision_id":0,"type":"depid","value":"2000069"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:02000069","sets":["418:1704433133930"]},"author_link":["22968","22497","30","30"],"control_number":"2000069","item_9_biblio_info_5":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2023-07-31","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"26","bibliographicPageStart":"13","bibliographicVolumeNumber":"11","bibliographic_titles":[{"bibliographic_title":"名古屋工業大学先進セラミックス研究センター年報","bibliographic_titleLang":"ja"},{"bibliographic_title":"Annual report Advanced Ceramics Research Center Nagoya Institute of Technology","bibliographic_titleLang":"en"}]}]},"item_9_description_10":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Hydrogen silsesquioxane (HSQ) is a versatile inorganic material that has garnered significant attention in the semiconductor industry, such as in micro-/nano-electromechanical systems, photonic devices, and nanoelectronics, owing to its high silicon content, small molecular size, low dielectric constant, excellent line edge roughness, high etching resistance, and local planarization capabilities. This review article discusses the application-related aspects of HSQ in nanomanufacturing for integrated circuits and nanoscale patterning, and the technical applications of HSQ in the fabrication of semiconductor silicon-based nanomaterials.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_9_full_name_4":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"30","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000030571426","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000030571426"}],"names":[{"name":"白井, 孝","nameLang":"ja"},{"name":"シライ, タカシ","nameLang":"ja-Kana"}]}]},"item_9_heading_13":{"attribute_name":"見出し","attribute_value_mlt":[{"subitem_heading_banner_headline":"〈解説〉","subitem_heading_language":"ja"},{"subitem_heading_banner_headline":"〈Review〉","subitem_heading_language":"en"}]},"item_9_publisher_6":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"名古屋工業大学先進セラミックス研究センター","subitem_publisher_language":"ja"}]},"item_9_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"21876738","subitem_source_identifier_type":"PISSN"}]},"item_9_source_id_8":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12617342","subitem_source_identifier_type":"NCID"}]},"item_9_version_type_9":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"XU, Yuping","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22968","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Xin, Yunzi","creatorNameLang":"en"}],"familyNames":[{"familyName":"Xin","familyNameLang":"en"}],"givenNames":[{"givenName":"Yunzi","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22497","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Shirai, Takashi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"30","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000030571426","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000030571426"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","date":[{"dateType":"Available","dateValue":"2024-02-07"}],"filename":"arnit2022_13.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"label":"本文_fulltext","objectType":"fulltext","url":"https://nitech.repo.nii.ac.jp/record/2000069/files/arnit2022_13.pdf"},"version_id":"d734f146-04a3-4785-acf4-6449625041f4"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Applications of Hydrogen Silsesquioxane in Nanomanufacturing and Nanofabrication","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Applications of Hydrogen Silsesquioxane in Nanomanufacturing and Nanofabrication","subitem_title_language":"en"}]},"item_type_id":"9","owner":"16","path":["1704433133930"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2024-02-07"},"publish_date":"2024-02-07","publish_status":"0","recid":"2000069","relation_version_is_last":true,"title":["Applications of Hydrogen Silsesquioxane in Nanomanufacturing and Nanofabrication"],"weko_creator_id":"16","weko_shared_id":3},"updated":"2024-02-16T05:19:53.161047+00:00"}