{"created":"2023-05-15T12:34:07.173861+00:00","id":2277,"links":{},"metadata":{"_buckets":{"deposit":"f0ce81b1-7d60-401b-bc75-183ac8412831"},"_deposit":{"created_by":91,"id":"2277","owners":[91],"pid":{"revision_id":0,"type":"depid","value":"2277"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:00002277","sets":["399:405"]},"author_link":["61"],"item_9_biblio_info_5":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007-03-31","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"50","bibliographicPageStart":"46","bibliographicVolumeNumber":"6","bibliographic_titles":[{"bibliographic_title":"セラミックス基盤工学研究センター年報","bibliographic_titleLang":"ja"},{"bibliographic_title":"Annual report of the Ceramics Research Laboratory Nagoya Institute of Technology","bibliographic_titleLang":"en"}]}]},"item_9_description_10":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"The study of NdFeB thin film for the application of the MEMS devices has been summarized in this article. The high magnetic performance NdFeB film has been already realized on the Mo or Ta metal substrates. For the concrete application of the micro-magnetic motor or actuator, the film should be prepared on the semiconductor substrate such as Si. We report the synthesis of the NdFeB thin films on Si substrate at the present stage of our group. The thin films were synthesized by the RF sputtering and the post annealing technique. The as-deposited film is amorphous and the magnetic hysteresis loop shows the soft magnetism. After annealing treatment, the Nd2Fe14B phase was crystallized. The SEM micrographs of the cross section indicate that the magnetic domain size is close to the single domain size, however, the domain size becomes smaller than that on the Mo substrate.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_9_heading_13":{"attribute_name":"見出し","attribute_value_mlt":[{"subitem_heading_banner_headline":"<解説>","subitem_heading_language":"ja"},{"subitem_heading_banner_headline":"<Review>","subitem_heading_language":"en"}]},"item_9_publisher_6":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"名古屋工業大学セラミックス基盤工学研究センター","subitem_publisher_language":"ja"}]},"item_9_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1347-1694","subitem_source_identifier_type":"PISSN"}]},"item_9_source_id_8":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11625130","subitem_source_identifier_type":"NCID"}]},"item_9_version_type_9":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"安達, 信泰","creatorNameLang":"ja"},{"creatorName":"アダチ, ノブヤス","creatorNameLang":"ja-Kana"},{"creatorName":"Adachi, Nobuyasu","creatorNameLang":"en"}],"familyNames":[{"familyName":"安達","familyNameLang":"ja"},{"familyName":"アダチ","familyNameLang":"ja-Kana"},{"familyName":"Adachi","familyNameLang":"en"}],"givenNames":[{"givenName":"信泰","givenNameLang":"ja"},{"givenName":"ノブヤス","givenNameLang":"ja-Kana"},{"givenName":"Nobuyasu","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"61","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000090262956","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000090262956"}]},{"creatorNames":[{"creatorName":"伊佐, 泰紀","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"太田, 敏孝","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"奥田, 高士","creatorNameLang":"ja"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-12-07"}],"displaytype":"detail","filename":"arnit2006_46-50.pdf","filesize":[{"value":"1.9 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"本文_fulltext","objectType":"fulltext","url":"https://nitech.repo.nii.ac.jp/record/2277/files/arnit2006_46-50.pdf"},"version_id":"78f21645-7d41-4766-a4e7-cbc36c171442"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"マイクロアクチュエーター用の希土類薄膜磁石の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"マイクロアクチュエーター用の希土類薄膜磁石の開発","subitem_title_language":"ja"},{"subitem_title":"マイクロ　アクチュエーター　ヨウ　ノ　キドルイ　ハクマク　ジシャク　ノ　カイハツ","subitem_title_language":"ja-Kana"},{"subitem_title":"Synthesis of the Rare Earth Magnet Film for Microactuators","subitem_title_language":"en"}]},"item_type_id":"9","owner":"91","path":["405"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2011-08-09"},"publish_date":"2011-08-09","publish_status":"0","recid":"2277","relation_version_is_last":true,"title":["マイクロアクチュエーター用の希土類薄膜磁石の開発"],"weko_creator_id":"91","weko_shared_id":-1},"updated":"2024-11-29T00:22:57.494123+00:00"}