@article{oai:nitech.repo.nii.ac.jp:00002317,
 author = {虎谷, 秀穂 and 日比野, 寿 and 井田, 隆 and Ida, Takashi and 桑野, 範之},
 journal = {セラミックス基盤工学研究センター年報 = Annual report of the Ceramics Research Laboratory Nagoya Institute of Technology},
 month = {Mar},
 note = {A quantitative basis for the rocking curve measurement of the preferred orientation in polycrystalline thin films is presented.The preferred orientation distribution, represented by the Gaussian distribution functions, is determined by the least-squares fit ofa theoretical rocking curve to the observed curve, and a volume fraction of crystallites, whose normals to the crystal plane arepresent within a semi-vertical angle, can be obtained from it. A depth-dependent preferred orientation distribution in the AlNthin film was revealed by using double-layer and multiple-layer models. The preferred orientation of very small degree in Authin films could also be measured., application/pdf},
 pages = {31--38},
 title = {ロッキングカーブ測定を用いた多結晶薄膜における配向の解析},
 volume = {2},
 year = {2003},
 yomi = {トラヤ, ヒデオ and ヒビノ, ヒサシ and イダ, タカシ}
}