{"created":"2023-05-15T12:34:08.973068+00:00","id":2317,"links":{},"metadata":{"_buckets":{"deposit":"42feac84-b33d-405b-888e-cc99b3f4f1ad"},"_deposit":{"created_by":3,"id":"2317","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"2317"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:00002317","sets":["399:409"]},"author_link":["6491","6495","6214","12","6494"],"item_9_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"ロッキング　カーブ　ソクテイ　オ　モチイタ　タケッショウ　ハクマク　ニオケル　ハイコウ　ノ　カイセキ"},{"subitem_alternative_title":"Analysis of Preferred Orientation in Polycrystalline Thin Films Using Rocking Curve Measurement"}]},"item_9_biblio_info_5":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-03-31","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"38","bibliographicPageStart":"31","bibliographicVolumeNumber":"2","bibliographic_titles":[{"bibliographic_title":"セラミックス基盤工学研究センター年報 = Annual report of the Ceramics Research Laboratory Nagoya Institute of Technology"}]}]},"item_9_description_10":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"A quantitative basis for the rocking curve measurement of the preferred orientation in polycrystalline thin films is presented.The preferred orientation distribution, represented by the Gaussian distribution functions, is determined by the least-squares fit ofa theoretical rocking curve to the observed curve, and a volume fraction of crystallites, whose normals to the crystal plane arepresent within a semi-vertical angle, can be obtained from it. A depth-dependent preferred orientation distribution in the AlNthin film was revealed by using double-layer and multiple-layer models. The preferred orientation of very small degree in Authin films could also be measured.","subitem_description_type":"Other"}]},"item_9_description_11":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_9_full_name_4":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"6495","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Toraya, Hideo"}]},{"nameIdentifiers":[{"nameIdentifier":"6214","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Hibino, Hisashi"}]},{"affiliations":[{"affiliationNames":[{"affiliationName":"","lang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"","nameIdentifierScheme":"ISNI","nameIdentifierURI":"http://www.isni.org/isni/"}]}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{"nameIdentifier":"12","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000080232388","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000080232388"}],"names":[{"name":"井田, 隆","nameLang":"ja"},{"name":"イダ, タカシ","nameLang":"ja-Kana"},{"name":"Ida, Takashi","nameLang":"en"}]}]},"item_9_heading_13":{"attribute_name":"見出し","attribute_value_mlt":[{"subitem_heading_banner_headline":"<論文>","subitem_heading_language":"ja"},{"subitem_heading_banner_headline":"<Paper>","subitem_heading_language":"en"}]},"item_9_publisher_6":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"名古屋工業大学セラミックス基盤工学研究センター"}]},"item_9_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13471694","subitem_source_identifier_type":"ISSN"}]},"item_9_source_id_8":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11625130","subitem_source_identifier_type":"NCID"}]},"item_9_version_type_9":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"虎谷, 秀穂"},{"creatorName":"トラヤ, ヒデオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"日比野, 寿"},{"creatorName":"ヒビノ, ヒサシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":""}],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"井田, 隆","creatorNameLang":"ja"},{"creatorName":"イダ, タカシ","creatorNameLang":"ja-Kana"},{"creatorName":"Ida, Takashi","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"桑野, 範之"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-12-07"}],"displaytype":"detail","filename":"arnit2002_31-38.pdf","filesize":[{"value":"117.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"本文_fulltext","url":"https://nitech.repo.nii.ac.jp/record/2317/files/arnit2002_31-38.pdf"},"version_id":"64f65a5b-44db-466b-8b5b-8948a9fb3d89"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ロッキングカーブ測定を用いた多結晶薄膜における配向の解析","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ロッキングカーブ測定を用いた多結晶薄膜における配向の解析"}]},"item_type_id":"9","owner":"3","path":["409"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-08-04"},"publish_date":"2011-08-04","publish_status":"0","recid":"2317","relation_version_is_last":true,"title":["ロッキングカーブ測定を用いた多結晶薄膜における配向の解析"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2024-01-31T04:35:35.002381+00:00"}