@phdthesis{oai:nitech.repo.nii.ac.jp:00002743, author = {中尾, 節男}, month = {2016-12-23, 2016-12-23}, note = {主査:丸野 重雄, application/pdf}, school = {名古屋工業大学}, title = {プラズマを用いたダイヤモンド膜の低温気相合成}, year = {}, yomi = {ナカオ, セツオ} }