@phdthesis{oai:nitech.repo.nii.ac.jp:00002770,
 author = {小田, 政利},
 month = {2016-12-23},
 note = {主査：和田　隆夫, application/pdf},
 school = {名古屋工業大学},
 title = {Ｘ線マスクの高精度化に関する研究},
 year = {},
 yomi = {オダ, マサトシ}
}