@phdthesis{oai:nitech.repo.nii.ac.jp:00003076,
 author = {Vu, Le Huy},
 month = {2016-12-26, 2016-12-26},
 note = {主査：神谷　庄司},
 school = {名古屋工業大学},
 title = {A Study of Statistical Characterization of　Strength and Fatigue Lifetime for　Silicon and Polysilicon Structures in MEMS},
 year = {}
}