@phdthesis{oai:nitech.repo.nii.ac.jp:00003296, author = {内田, 秀雄}, month = {2017-01-06}, note = {主査:梅野 正義, application/pdf}, school = {名古屋工業大学}, title = {Si基板上化合物半導体の高品質化に関する研究}, year = {}, yomi = {ウチダ, ヒデオ} }