{"created":"2023-05-15T12:35:43.200361+00:00","id":4745,"links":{},"metadata":{"_buckets":{"deposit":"c87d9587-72f1-4225-b761-60b5bff44fc8"},"_deposit":{"created_by":91,"id":"4745","owners":[91],"pid":{"revision_id":0,"type":"depid","value":"4745"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:00004745","sets":["31"]},"author_link":["8700","15236","8700","15234"],"item_10001_biblio_info_28":{"attribute_name":"bibliographic_information","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-10","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"5","bibliographicPageEnd":"1929","bibliographicPageStart":"1923","bibliographicVolumeNumber":"17","bibliographic_titles":[{"bibliographic_title":"Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures","bibliographic_titleLang":"en"}]}]},"item_10001_description_36":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Using a plasma-gas-condensation-type cluster source, we could obtain nano-scale clusters with the average diameter between 2 and 13 nm. In order to detect such large free clusters containing 1-105atoms, we have constructed a time-of-flight high-mass spectrometer (TOF-HMS). The size distribution of the Nbn clusters observed by the TOF-HMS is in good agreement with the result of the transmission electron microscope observation. The mass spectra have been measured with varying the operational parameters of the cluster source. They are shifted to the smaller size direction and the mass distribution becomes narrower with increasing the He gas flow rate, VHe, and keeping the Ar gas flow rate, VAr, constant. These features are attributable to the decrease in the residence times of gaseous species in the cluster source. The cluster size increases with increasing the Ar gas pressure and lowering the temperature of the cluster source.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_10001_full_name_27":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"8700","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000060324480","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000060324480"}],"names":[{"name":"日原, 岳彦"}]},{"nameIdentifiers":[{"nameIdentifier":"15236","nameIdentifierScheme":"WEKO"}],"names":[{"name":"隅山, 兼治"}]}]},"item_10001_publisher_29":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Vacuum Society","subitem_publisher_language":"en"}]},"item_10001_source_id_30":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1071-1023","subitem_source_identifier_type":"ISSN"}]},"item_10001_source_id_32":{"attribute_name":"item_10001_source_id_32","attribute_value_mlt":[{"subitem_source_identifier":"AA10804928","subitem_source_identifier_type":"NCID"}]},"item_10001_version_type_33":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Hihara, Takehiko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"8700","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"1000060324480","nameIdentifierScheme":"NRID","nameIdentifierURI":"http://rns.nii.ac.jp/nr/1000060324480"}]},{"creatorNames":[{"creatorName":"Sumiyama, Kenji","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"15234","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-01-24"}],"displaytype":"detail","filename":"JVB 17_1923.pdf","filesize":[{"value":"348.5 kB"}],"format":"application/pdf","license_note":"Copyright(1999) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science aology B, 17(5),pp.1923-1929 ; 1999 and may be found at http://link.aip.org/link/?jvb/17/1923.","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"本文_fulltext","url":"https://nitech.repo.nii.ac.jp/record/4745/files/JVB 17_1923.pdf"},"version_id":"5b121347-2ab0-4845-93c6-c59a54524084"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"item_resource_type","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Time-of-flight high-mass spectrometer observation of large size Nb clusters toward assembling of size controlled clusters","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Time-of-flight high-mass spectrometer observation of large size Nb clusters toward assembling of size controlled clusters","subitem_title_language":"en"}]},"item_type_id":"10001","owner":"91","path":["31"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2012-11-06"},"publish_date":"2012-11-06","publish_status":"0","recid":"4745","relation_version_is_last":true,"title":["Time-of-flight high-mass spectrometer observation of large size Nb clusters toward assembling of size controlled clusters"],"weko_creator_id":"91","weko_shared_id":-1},"updated":"2025-03-17T05:15:59.066752+00:00"}