{"created":"2023-05-15T12:35:50.363673+00:00","id":4915,"links":{},"metadata":{"_buckets":{"deposit":"51a30810-be67-4898-8305-459954f97cea"},"_deposit":{"created_by":3,"id":"4915","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"4915"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:00004915","sets":["31"]},"author_link":["8759","16118","16117"],"item_10001_alternative_title_24":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"YAG　レーザー デポジション　ニヨル　PZT　ハクマク　ゴウセイ　カテイ　ニオケル　バルク ターゲット　ハクマクカン　ノ　ソセイ　ヘンドウ　ノ　ヒョウカ"},{"subitem_alternative_title":"Evaluation for Compositional Deviation between PZT Bulk Target and Its Thin Film Synthesized by YAG Laser Deposition"}]},"item_10001_biblio_info_28":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001-02-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1266","bibliographicPageEnd":"154","bibliographicPageStart":"149","bibliographicVolumeNumber":"109","bibliographic_titles":[{"bibliographic_title":"Journal of the Ceramic Society of Japan"}]}]},"item_10001_description_36":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"In the process starting from fabrication of sintered PZT bulk target to its thin-film synthesis on Pt/Ti/SiO_2/Si substrates by pulsed laser deposition technique, the precise composition analysis has been carried out by X-ray fluorescence (XRF) measurement. The coexistent elemental effect was calibrated by a multiple regression analysis of normalized PZT specimens. As a result, an excellent XRF table for precise quantitative analysis of PZT system in the vicinity of the morphotropic phase boundary (MPB) around Zr/Ti=53/47 was prepared. X-ray diffraction (XRD) and its modeling calculation supported XRF results and evaluated Pb stoichiometry in the perovskite structure during sintering process of PZT bulk ceramics. Undre the variation of the partial oxygen pressure from 1 to 10 Pa in the PLD conditions, 5 Pa was the most suitable for PZT film growth highly oriented to perovskite (111) direction, and the composition deviation between bulk target and thin film was also investigated. Further effects of target degradation by laser-beam irradiation on the film stoichiometry and crystallinity were discussed.","subitem_description_type":"Other"}]},"item_10001_description_38":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10001_full_name_27":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{},{}],"names":[{"name":"Kakimoto, Ken-ichi"}]}]},"item_10001_publisher_29":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"The Ceramic Society of Japan"}]},"item_10001_source_id_30":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"09145400","subitem_source_identifier_type":"ISSN"}]},"item_10001_source_id_32":{"attribute_name":"書誌レコードID（NCID）","attribute_value_mlt":[{"subitem_source_identifier":"AN10040326","subitem_source_identifier_type":"NCID"}]},"item_10001_version_type_33":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"柿本, 健一"},{"creatorName":"カキモト, ケンイチ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"掛本, 博文"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"増田, 陽一郎"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-01-25"}],"displaytype":"detail","filename":"JCSJ 109_149.pdf","filesize":[{"value":"3.6 MB"}],"format":"application/pdf","license_note":"(c) 2001 The Ceramic Society of Japan","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"本文_fulltext","url":"https://nitech.repo.nii.ac.jp/record/4915/files/JCSJ 109_149.pdf"},"version_id":"c0ea5d44-c040-465b-a25a-741f8ad699a7"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"YAGレーザーデポジションによるPZT薄膜合成過程におけるバルクターゲット-薄膜間の組成変動の評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"YAGレーザーデポジションによるPZT薄膜合成過程におけるバルクターゲット-薄膜間の組成変動の評価"}]},"item_type_id":"10001","owner":"3","path":["31"],"pubdate":{"attribute_name":"公開日","attribute_value":"2012-11-06"},"publish_date":"2012-11-06","publish_status":"0","recid":"4915","relation_version_is_last":true,"title":["YAGレーザーデポジションによるPZT薄膜合成過程におけるバルクターゲット-薄膜間の組成変動の評価"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-05-15T14:39:28.636508+00:00"}