Global  model of inductively coupled Ar plasmas using two-temperature approximation

JAP 89_4240

WEKO3

lat lon distance

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JAP 89_4240.pdf

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JAP 89_4240.pdf (118.4 kB) sha256 f5a76588aa1a6665455a302c54a5b037077a4dac425defe45f58cad066d00fc9	Copyright (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 89(8), pp.4240- 4246 ; 2001 and may be found at http://link.aip.org/link/?jap/89/4240

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