Model and probe measurements of inductively coupled CF4 discharges

JAP 92_1780

WEKO3

lat lon distance

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Field does not validate

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JAP 92_1780.pdf

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JAP 92_1780.pdf (113.4 kB) sha256 514fe4fbc76cc91e761fbb53d6551d473a4bbe866ee61013707b9fcd171a8622	Copyright (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.The following article appeared in Journal of Applied Physics, 92(4), pp.1780- 1787 ; 2002 and may be found at http://link.aip.org/link/?jap/92/1780

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