@article{oai:nitech.repo.nii.ac.jp:00005128, author = {Serrona, L. K. E. B. and Sugimura, A. and 安達, 信泰 and Adachi, Nobuyasu and Okuda, T. and Osato, H. and Sakamoto, I. and Nakanishi, A. and Motokawa, M. and Ping, D. H. and Hono, K.}, issue = {11}, journal = {APPLIED PHYSICS LETTERS}, month = {Mar}, note = {Relatively good hard magnetic properties obtained from Nd2Fe14B films prepared by the rf sputtering technique were investigated in terms of the microstructural development. Although as-deposited films on Mo substrates deposited at substrate temperatures (Ts) of 365°C were amorphous with the dispersion of nanocrystalline NdO particles, columnar grains of Nd2Fe14B phase with the c-axis perpendicular to the film plane developed after annealing at 650°C at an optimized heating rate. Nd2Fe14B grain size was about 400 nm in average and NdO particles of about 10 nm were dispersed within the grains and along the grain boundaries. These films exhibited good perpendicular hard magnetic properties of iHc = 1356kA/m and (BH)MAX ~ 216kJ/m3., application/pdf}, pages = {1751--1753}, title = {Structure and magnetic properties of high coercive NdFeB films with a perpendicular anisotropy}, volume = {82}, year = {2003}, yomi = {アダチ, ノブヤス} }