EryuOsamu_2011_AVS(AIP).pdf (642.5 kB)
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Copyright(2011) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in Journal of Vacuum Science a Technology A, 29, 032210 ; 2011 and may be found at http://dx.doi.org/10.1116/1.3592993 |
EryuOsamu_2011_AVS(AIP).pdf
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https://nitech.repo.nii.ac.jp/record/5520/files/EryuOsamu_2011_AVS(AIP).pdf