@article{oai:nitech.repo.nii.ac.jp:00005655,
 author = {Freedsman, Joseph J. and Kubo, Toshiharu and Egawa, Takashi},
 issue = {2},
 journal = {AIP advances},
 month = {Jun},
 note = {application/pdf},
 pages = {022134-1--022134-9},
 title = {Effect of AlN growth temperature on trap densities of in-situ metal-organic chemical vapor deposition grown AlN/AlGaN/GaN metal-insulator-semiconductor heterostructure field-effect transistors},
 volume = {2},
 year = {2012}
}