@article{oai:nitech.repo.nii.ac.jp:00005785,
 author = {Yoshihara, Kazuki and Kato, Masashi and Ichimura, Masaya and Hatayama, Tomoaki and Ohshima, Takeshi},
 journal = {Materials Science Forum},
 month = {Feb},
 note = {application/pdf},
 pages = {373--376},
 title = {Deep levels in p-type 4H-SiC induced by low-energy electron irradiation},
 volume = {740-742},
 year = {2013}
}