@phdthesis{oai:nitech.repo.nii.ac.jp:00005916,
 author = {Chen, Chuantong},
 month = {2017-02-10, 2017-07-12},
 note = {主査：神谷　庄司},
 school = {名古屋工業大学},
 title = {Fracture Mechanics Evaluation of Cu/SiN Interface Adhesion Strength in the Multilayer Thin Film Structure of LSI Interconnects},
 year = {}
}