@article{oai:nitech.repo.nii.ac.jp:00006070, author = {Hiroshiba, Nobuya and Yano, Wataru and Okumura, Ryuji and Ichikawa, Yo}, issue = {2}, journal = {IEICE transactions on electronics}, month = {}, note = {We demonstrated a novel technique to fabricate nanosized structures on a Nafion membrane, using thermal nanoimprinting with a 5 × 5 μm2 square pattern Si mold without any polymer damage. A 24 MPa thermal imprinting pressure was used for 10 min. We observed high aspect ratio (∼1:10) pillars on the surface after imprinting at 200°C. Finally, we used a novel quartz mold with a 200 nm resolution dot pattern., application/pdf}, pages = {133--135}, title = {Fabrication of Nanosized Structures on Nafion Membranes by Thermal Nanoimprinting}, volume = {98}, year = {2015} }