@article{oai:nitech.repo.nii.ac.jp:00006073, author = {Miyoshi, Makoto and Fujita, Shu and Egawa, Takashi}, issue = {1}, journal = {Journal of vacuum science and technology. B, Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena}, month = {Jan}, note = {application/pdf}, title = {Demonstration of NOx gas sensing for Pd/ZnO/GaN heterojunction diodes}, volume = {33}, year = {2015} }