{"created":"2023-05-15T12:36:39.947827+00:00","id":6076,"links":{},"metadata":{"_buckets":{"deposit":"239c5b66-d6f6-4b4c-a92c-2d74ba6d047c"},"_deposit":{"created_by":91,"id":"6076","owners":[91],"pid":{"revision_id":0,"type":"depid","value":"6076"},"status":"published"},"_oai":{"id":"oai:nitech.repo.nii.ac.jp:00006076","sets":["31"]},"author_link":["6762","8139","6762","22061"],"item_10001_alternative_title_24":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"A Practice of T^2-Q Control Charts in Semiconductor Manufacturing Process : A paradigm shift from monitoring the amount of variation to monitoring the pattern of variation","subitem_alternative_title_language":"en"}]},"item_10001_biblio_info_28":{"attribute_name":"bibliographic_information","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2014","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"3","bibliographicPageEnd":"350","bibliographicPageStart":"341","bibliographicVolumeNumber":"44","bibliographic_titles":[{"bibliographic_title":"品質","bibliographic_titleLang":"ja"}]}]},"item_10001_description_36":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"半導体製造工程(ウエーハプロセス)においては,品質特性のウエーハ内変動の大きさより変動パターンが問題となる場合がある.ウエーハ内の変動パターンには,加工装置への副生成物の付着や主要パーツの劣化,副生成物の除去とパーツ交換を行う装置メンテナンスの効果を受け,特有の繰り返しパターンが現れる.このウエーハ内変動は\"ばらつきの大きさ\"ではなく\"ばらつきのパターン\"であることから,ウエーハ内変動をばらつきパターンの情報を持たないR管理図によってモニターすることは妥当ではなく,測定位置を変数とした多変量管理図の利用を考えることができる.本研究では,多変量管理図の変形でありJackson and Mudholkar(1979)によって提案されたT^2-Q管理図に着目し,1)T^2統計量とQ統計量を構成する主成分の分割に対する考え方 2)寄与プロットの応用 3)ばらつきのパターンをモニタリングする必要性について提案と考察を行う.この考え方は,従来型管理図の主流であった変動の大きさの管理から,変動パターンの管理に視点を転換する方法の一つである.","subitem_description_language":"ja","subitem_description_type":"Other"}]},"item_10001_full_name_27":{"attribute_name":"著者別名","attribute_value_mlt":[{"familyNames":[{"familyName":"Nishina","familyNameLang":"en"},{"familyName":"仁科","familyNameLang":"ja"},{"familyName":"ニシナ","familyNameLang":"ja-Kana"}],"givenNames":[{"givenName":"Ken","givenNameLang":"en"},{"givenName":"健","givenNameLang":"ja"},{"givenName":"ケン","givenNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"6762","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Nishina, Ken","nameLang":"en"},{"name":"仁科, 健","nameLang":"ja"},{"name":"ニシナ, 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