@inproceedings{oai:nitech.repo.nii.ac.jp:00006317, author = {前田, 佳弘 and Maeda, Yoshihiro and 岩崎, 誠 and Iwasaki, Makoto}, book = {2016 IEEE 25th International Symposium on Industrial Electronics (ISIE)}, month = {}, note = {application/pdf, Santa Clara, US, 8-10 June 2016}, pages = {1126--1131}, publisher = {IEEE}, title = {Analysis of Response Variation in Fast and Precise Micrometer Stroke Positioning}, year = {2016}, yomi = {マエダ, ヨシヒロ and イワサキ, マコト} }