@article{oai:nitech.repo.nii.ac.jp:00006416,
 author = {Yasuda, K. and Niraula, Madan and Araki, N. and Miyata, M. and Kitagawa, S. and Kojima, M. and Ozawa, J. and Tsubota, S. and Yamaguchi, T. and Agata, Y.},
 issue = {9},
 journal = {Journal of Electronic Materials},
 month = {Sep},
 note = {application/pdf},
 pages = {5400--5404},
 title = {Dry Etching Characteristics of MOVPE-Grown CdTe Epilayers in CH4, H2, Ar ECR Plasmas},
 volume = {46},
 year = {2017}
}