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Nondestructive measurements of depth distribution of carrier lifetimes in 4H–SiC thick epitaxial layers using time-resolved free carrier absorption with intersectional lights
https://nitech.repo.nii.ac.jp/records/6646
https://nitech.repo.nii.ac.jp/records/6646607503e3-f2ac-4ec4-9fcb-89f2689a5df9
名前 / ファイル | ライセンス | アクション |
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This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.
The following article appeared in T. Hirayama et al., Rev. sci. instrum. 91, 123902 (2020) and may be found at https://doi.org/10.1063/5.0018080. |
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-12-10 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Nondestructive measurements of depth distribution of carrier lifetimes in 4H–SiC thick epitaxial layers using time-resolved free carrier absorption with intersectional lights | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Hirayama, Takashi
× Hirayama, Takashi× Nagaya, Keisuke× Miyasaka, Akira× Kojima, Kazutoshi× Kato, Tomohisa× Okumura, Hajime× Kato, Masashi |
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著者別名 | ||||||
姓名 | 加藤, 正史 | |||||
書誌情報 |
en : Review of Scientific Instruments 巻 91, 号 12, p. 123902, 発行日 2020-12-07 |
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出版者 | ||||||
出版者 | American Institute of Physics | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00346748 | |||||
書誌レコードID(NCID) | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00817730 | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/5.0018080 | |||||
関連名称 | 10.1063/5.0018080 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf |