WEKO3
アイテム
{"_buckets": {"deposit": "211d1eaa-3c1a-488a-a2bc-5249d7382938"}, "_deposit": {"created_by": 16, "id": "3076", "owners": [16], "pid": {"revision_id": 0, "type": "depid", "value": "3076"}, "status": "published"}, "_oai": {"id": "oai:nitech.repo.nii.ac.jp:00003076", "sets": ["514", "541"]}, "author_link": [], "item_2_alternative_title_1": {"attribute_name": "その他(別言語等)のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "MEMS 構造材料としてのシリコンおよびポリシリコンを対象とした強度と疲労寿命の統計的性質に関する研究", "subitem_alternative_title_language": "ja"}]}, "item_2_date_granted_8": {"attribute_name": "学位授与年月日", "attribute_value_mlt": [{"subitem_dategranted": "2013-03-23"}]}, "item_2_degree_grantor_10": {"attribute_name": "学位授与機関", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_language": "ja", "subitem_degreegrantor_name": "名古屋工業大学"}], "subitem_degreegrantor_identifier": [{"subitem_degreegrantor_identifier_name": "13903", "subitem_degreegrantor_identifier_scheme": "kakenhi"}]}]}, "item_2_degree_name_6": {"attribute_name": "学位名", "attribute_value_mlt": [{"subitem_degreename": "博士(工学)", "subitem_degreename_language": "ja"}, {"subitem_degreename": "Doctor of Engineering", "subitem_degreename_language": "en"}]}, "item_2_description_11": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "主査:神谷 庄司", "subitem_description_language": "ja", "subitem_description_type": "Other"}]}, "item_2_dissertation_number_7": {"attribute_name": "学位授与番号", "attribute_value_mlt": [{"subitem_dissertationnumber": "甲第862号"}]}, "item_2_version_type_9": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Vu, Le Huy", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "7974"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-12-26"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ko0862_a.pdf", "filesize": [{"value": "461.8 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 461800.0, "url": {"label": "要旨_abstract_review", "objectType": "abstract", "url": "https://nitech.repo.nii.ac.jp/record/3076/files/ko0862_a.pdf"}, "version_id": "949f9ef6-788b-4f0e-a513-f20088a9dd27"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-12-26"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "ko0862.pdf", "filesize": [{"value": "17.4 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 17400000.0, "url": {"label": "本文_fulltext", "objectType": "fulltext", "url": "https://nitech.repo.nii.ac.jp/record/3076/files/ko0862.pdf"}, "version_id": "7780e8e3-dd96-4fd2-a457-fdd735a244ce"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Strength", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Fatigue Lifetime", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Silicon", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Polysilicon", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Weibull distribution", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Paris\u0027 law", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "doctoral thesis", "resourceuri": "http://purl.org/coar/resource_type/c_db06"}]}, "item_title": "A Study of Statistical Characterization of Strength and Fatigue Lifetime for Silicon and Polysilicon Structures in MEMS", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "A Study of Statistical Characterization of Strength and Fatigue Lifetime for Silicon and Polysilicon Structures in MEMS", "subitem_title_language": "en"}]}, "item_type_id": "2", "owner": "16", "path": ["514", "541"], "permalink_uri": "https://nitech.repo.nii.ac.jp/records/3076", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2014-06-25"}, "publish_date": "2014-06-25", "publish_status": "0", "recid": "3076", "relation": {}, "relation_version_is_last": true, "title": ["A Study of Statistical Characterization of Strength and Fatigue Lifetime for Silicon and Polysilicon Structures in MEMS"], "weko_shared_id": -1}
A Study of Statistical Characterization of Strength and Fatigue Lifetime for Silicon and Polysilicon Structures in MEMS
https://nitech.repo.nii.ac.jp/records/3076
https://nitech.repo.nii.ac.jp/records/3076de4394e4-a638-43f6-a13d-76c6b33d5df4
名前 / ファイル | ライセンス | アクション |
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要旨_abstract_review (461.8 kB)
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本文_fulltext (17.4 MB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2014-06-25 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | A Study of Statistical Characterization of Strength and Fatigue Lifetime for Silicon and Polysilicon Structures in MEMS | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | MEMS 構造材料としてのシリコンおよびポリシリコンを対象とした強度と疲労寿命の統計的性質に関する研究 | |||||
言語 | ja | |||||
著者 |
Vu, Le Huy
× Vu, Le Huy |
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学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位名 | ||||||
言語 | en | |||||
学位名 | Doctor of Engineering | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第862号 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2013-03-23 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 13903 | |||||
言語 | ja | |||||
学位授与機関名 | 名古屋工業大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 主査:神谷 庄司 | |||||
言語 | ja | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Strength | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Fatigue Lifetime | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Silicon | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Polysilicon | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Weibull distribution | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Paris' law |