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ロッキングカーブ測定を用いた多結晶薄膜における配向の解析
https://nitech.repo.nii.ac.jp/records/2317
https://nitech.repo.nii.ac.jp/records/2317ceac9b41-7557-4076-87d0-2d8d4b8133a5
名前 / ファイル | ライセンス | アクション |
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本文_fulltext (117.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper_04(1) | |||||
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公開日 | 2011-08-04 | |||||
タイトル | ||||||
タイトル | ロッキングカーブ測定を用いた多結晶薄膜における配向の解析 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | ロッキング カーブ ソクテイ オ モチイタ タケッショウ ハクマク ニオケル ハイコウ ノ カイセキ | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Analysis of Preferred Orientation in Polycrystalline Thin Films Using Rocking Curve Measurement | |||||
著者 |
虎谷, 秀穂
× 虎谷, 秀穂× 日比野, 寿× 井田, 隆× 桑野, 範之 |
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著者別名 | ||||||
姓名 | Toraya, Hideo | |||||
著者別名 | ||||||
姓名 | Hibino, Hisashi | |||||
著者別名 | ||||||
姓名 | 井田, 隆 | |||||
言語 | ja | |||||
姓名 | イダ, タカシ | |||||
言語 | ja-Kana | |||||
姓名 | Ida, Takashi | |||||
言語 | en | |||||
書誌情報 |
セラミックス基盤工学研究センター年報 = Annual report of the Ceramics Research Laboratory Nagoya Institute of Technology 巻 2, p. 31-38, 発行日 2003-03-31 |
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出版者 | ||||||
出版者 | 名古屋工業大学セラミックス基盤工学研究センター | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13471694 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11625130 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | A quantitative basis for the rocking curve measurement of the preferred orientation in polycrystalline thin films is presented.The preferred orientation distribution, represented by the Gaussian distribution functions, is determined by the least-squares fit ofa theoretical rocking curve to the observed curve, and a volume fraction of crystallites, whose normals to the crystal plane arepresent within a semi-vertical angle, can be obtained from it. A depth-dependent preferred orientation distribution in the AlNthin film was revealed by using double-layer and multiple-layer models. The preferred orientation of very small degree in Authin films could also be measured. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
見出し | ||||||
大見出し | <論文> | |||||
言語 | ja | |||||
見出し | ||||||
大見出し | <Paper> | |||||
言語 | en |